| 7687793 |
Resistance variable memory cells |
Steven T. Harshfield |
2010-03-30 |
| 7235419 |
Method of making a memory cell |
Steven T. Harshfield |
2007-06-26 |
| 7102150 |
PCRAM memory cell and method of making same |
Steven T. Harshfield |
2006-09-05 |
| 7071021 |
PCRAM memory cell and method of making same |
Steven T. Harshfield |
2006-07-04 |
| 6833046 |
Planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
— |
2004-12-21 |
| 6768213 |
Automated combi deposition apparatus and method |
Richard Holscher, Ziad R. Hatab |
2004-07-27 |
| 6417076 |
Automated combi deposition apparatus and method |
Richard Holscher, Ziad R. Hatab |
2002-07-09 |
| 6387289 |
Planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
— |
2002-05-14 |
| 6309282 |
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization |
John Skrovan |
2001-10-30 |
| 6251785 |
Apparatus and method for polishing a semiconductor wafer in an overhanging position |
— |
2001-06-26 |
| 6186870 |
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization |
John Skrovan |
2001-02-13 |
| 6062958 |
Variable abrasive polishing pad for mechanical and chemical-mechanical planarization |
John Skrovan |
2000-05-16 |
| 5945347 |
Apparatus and method for polishing a semiconductor wafer in an overhanging position |
— |
1999-08-31 |
| 5882248 |
Apparatus for separating wafers from polishing pads used in chemical-mechanical planarization of semiconductor wafers |
Mike Walker, Karl M. Robinson |
1999-03-16 |
| 5658190 |
Apparatus for separating wafers from polishing pads used in chemical-mechanical planarization of semiconductor wafers |
Mike Walker, Karl M. Robinson |
1997-08-19 |
