Issued Patents All Time
Showing 176–180 of 180 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5288368 | Electron beam lithography with reduced charging effects | John J. DeMarco | 1994-02-22 |
| 5275896 | Single-alignment-level lithographic technique for achieving self-aligned features | Joseph Garofalo, Robert L. Kostelak, Jr., Sheila Vaidya | 1994-01-04 |
| 5246799 | Method of removing excess material, for repairing phase-shifting lithographic masks | — | 1993-09-21 |
| 5246801 | Method of repairing indentations in phase-shifting lithographic masks | — | 1993-09-21 |
| 5244759 | Single-alignment-level lithographic technique for achieving self-aligned features | — | 1993-09-14 |