Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5589303 | Self-aligned opaque regions for attenuating phase-shifting masks | John J. DeMarco, Taeho Kook | 1996-12-31 |
| 5538819 | Self-aligned alignment marks for phase-shifting masks | John J. DeMarco | 1996-07-23 |
| 5358827 | Phase-shifting lithographic masks with improved resolution | Joseph Garofalo, Sheila Vaidya | 1994-10-25 |
| 5338626 | Fabrication of phase-shifting lithographic masks | Joseph Garofalo, Christophe Pierrat, Sheila Vaidya | 1994-08-16 |
| 5275896 | Single-alignment-level lithographic technique for achieving self-aligned features | Joseph Garofalo, Christophe Pierrat, Sheila Vaidya | 1994-01-04 |
| 5153083 | Method of making phase-shifting lithographic masks | Joseph Garofalo, Sheila Vaidya | 1992-10-06 |
| 4992394 | Self aligned registration marks for integrated circuit fabrication | William T. Lynch, Sheila Vaidya | 1991-02-12 |