Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7579601 | Spectrometer with moveable detector element | Anthony T. Hayes | 2009-08-25 |
| 7511265 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement | Phillip Walsh | 2009-03-31 |
| 7485869 | Prism spectrometer | Anthony T. Hayes | 2009-02-03 |
| 7446876 | Vacuum ultra-violet reflectometer with stray light correction | — | 2008-11-04 |
| 7399975 | Method and apparatus for performing highly accurate thin film measurements | — | 2008-07-15 |
| 7394551 | Vacuum ultraviolet referencing reflectometer | — | 2008-07-01 |
| 7391030 | Broad band referencing reflectometer | — | 2008-06-24 |
| 7342235 | Contamination monitoring and control techniques for use with an optical metrology instrument | Matthew Weldon | 2008-03-11 |
| 7282703 | Method and apparatus for accurate calibration of a reflectometer by using a relative reflectance measurement | Phillip Walsh | 2007-10-16 |
| 7271394 | Vacuum ultraviolet reflectometer having collimated beam | — | 2007-09-18 |
| 7189973 | Vacuum ultraviolet reflectometer integrated with processing system | — | 2007-03-13 |
| 7126131 | Broad band referencing reflectometer | — | 2006-10-24 |
| 7067818 | Vacuum ultraviolet reflectometer system and method | — | 2006-06-27 |
| 7026626 | Semiconductor processing techniques utilizing vacuum ultraviolet reflectometer | — | 2006-04-11 |
| 6710865 | Method of inferring optical parameters outside of a measurement spectral range | Abdul Rahim Forouhi, Erik Maiken, John Lam | 2004-03-23 |
| 6594025 | Method of monitoring thin-film processes and metrology tool thereof | Abdul Rahim Forouhi, Eric Maiken, John Lam | 2003-07-15 |
| 6392756 | Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate | Guoguang Li, Hongwei Zhu, Abdul Rahim Forouhi, Weilu Xu | 2002-05-21 |
| 6379014 | Graded anti-reflective coatings for photolithography | Guoguang Li, Abdul Rahim Forouhi | 2002-04-30 |
| 6327035 | Method and apparatus for optically examining miniature patterns | Guoguang Li, Abdul Rahim Forouhi | 2001-12-04 |
| 6091485 | Method and apparatus for optically determining physical parameters of underlayers | Guoguang Li, Hongwei Zhu, Abdul Rahim Forouhi, Weilu Xu | 2000-07-18 |