Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7649624 | Systems and methods for detecting scratches on non-semiconductor wafer surfaces | Martin Andrew Smith, Ronald Charles Dwelle, Gerard H. Vurens | 2010-01-19 |
| 6709981 | Method and apparatus for processing a semiconductor wafer using novel final polishing method | Alexis Grabbe, Mick Bjelopavlic, Ashley Hull, Michele Haler, Guoqiang Zhang +1 more | 2004-03-23 |
| 6613591 | Method of estimating post-polishing waviness characteristics of a semiconductor wafer | Milind S. Bhagavat, Gary L. Anderson, Brent Teasley | 2003-09-02 |
| 6479386 | Process for reducing surface variations for polished wafer | Kan-Yin Ng, Henry F. Erk, Darrel Harris, James Jose, Stephen Hensiek +3 more | 2002-11-12 |
| 6454635 | Method and apparatus for a wafer carrier having an insert | Guoqiang Zhang, Henry F. Erk | 2002-09-24 |
| 6227944 | Method for processing a semiconductor wafer | Ichiro Yoshimura, Henry F. Erk, Ralph V. Vogelgesang, Stephen Hensiek | 2001-05-08 |
| 6214704 | Method of processing semiconductor wafers to build in back surface damage | — | 2001-04-10 |
| 6200908 | Process for reducing waviness in semiconductor wafers | Roland R. Vandamme, Ankur H. Desai, Dale A. Witte | 2001-03-13 |
| 6114245 | Method of processing semiconductor wafers | Roland R. Vandamme, Zhijian Pei | 2000-09-05 |