Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6227944 | Method for processing a semiconductor wafer | Yun-Biao Xin, Ichiro Yoshimura, Henry F. Erk, Stephen Hensiek | 2001-05-08 |
| 6179950 | Polishing pad and process for forming same | Guoqiang Zhang, Gregory Owen Potts, Henry F. Erk | 2001-01-30 |
| 6135863 | Method of conditioning wafer polishing pads | David Zhang, Henry F. Erk | 2000-10-24 |