Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764071 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2023-09-19 |
| 11282715 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2022-03-22 |
| 11276582 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2022-03-15 |
| 11276583 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2022-03-15 |
| 10361097 | Apparatus for stressing semiconductor substrates | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2019-07-23 |
| 10184193 | Epitaxy reactor and susceptor system for improved epitaxial wafer flatness | — | 2019-01-22 |
| 10145011 | Substrate processing systems having multiple gas flow controllers | Arash Abedijaberi, Shawn George Thomas | 2018-12-04 |
| 9583364 | Processes and apparatus for preparing heterostructures with reduced strain by radial compression | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2017-02-28 |
| 9583363 | Processes and apparatus for preparing heterostructures with reduced strain by radial distension | Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht | 2017-02-28 |
| 9401271 | Susceptor assemblies for supporting wafers in a reactor apparatus | Manabu Hamano | 2016-07-26 |
| 9328420 | Gas distribution plate for chemical vapor deposition systems and methods of using same | Manabu Hamano | 2016-05-03 |
| 9193025 | Single side polishing using shape matching | Sumeet S. Bhagavat, Khiam-How Low, Ichiron Yoshimura | 2015-11-24 |
| 9117670 | Inject insert liner assemblies for chemical vapor deposition systems and methods of using same | Arash Abedijaberi, Shawn George Thomas | 2015-08-25 |
| 8940094 | Methods for fabricating a semiconductor wafer processing device | Manabu Hamano | 2015-01-27 |
| 8440541 | Methods for reducing the width of the unbonded region in SOI structures | Ichiro Yoshimura, Lu Fei | 2013-05-14 |
| 8404049 | Epitaxial barrel susceptor having improved thickness uniformity | Lance G. Hellwig, Srikanth Kommu | 2013-03-26 |
| 8340801 | Systems for generating representations of flatness defects on wafers | — | 2012-12-25 |
| 8330245 | Semiconductor wafers with reduced roll-off and bonded and unbonded SOI structures produced from same | Ichiro Yoshimura, Lu Fei | 2012-12-11 |
| 8186661 | Wafer holder for supporting a semiconductor wafer during a thermal treatment process | Thomas A. Torack | 2012-05-29 |
| 8165706 | Methods for generating representations of flatness defects on wafers | — | 2012-04-24 |
| 8080464 | Methods for processing silicon on insulator wafers | Swapnil Dhumal, Lawrence P. Flannery, Thomas A. Torack | 2011-12-20 |
| 7878562 | Semiconductor wafer carrier blade | Manabu Hamano, Lance G. Hellwig | 2011-02-01 |