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Apparatus for stressing semiconductor substrates |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2023-09-19 |
| 11282715 |
Apparatus for stressing semiconductor substrates |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2022-03-22 |
| 11276582 |
Apparatus for stressing semiconductor substrates |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2022-03-15 |
| 11276583 |
Apparatus for stressing semiconductor substrates |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2022-03-15 |
| 10361097 |
Apparatus for stressing semiconductor substrates |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2019-07-23 |
| 10184193 |
Epitaxy reactor and susceptor system for improved epitaxial wafer flatness |
— |
2019-01-22 |
| 10145011 |
Substrate processing systems having multiple gas flow controllers |
Arash Abedijaberi, Shawn George Thomas |
2018-12-04 |
| 9583364 |
Processes and apparatus for preparing heterostructures with reduced strain by radial compression |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2017-02-28 |
| 9583363 |
Processes and apparatus for preparing heterostructures with reduced strain by radial distension |
Robert J. Falster, Vladimir V. Voronkov, Peter Albrecht |
2017-02-28 |
| 9401271 |
Susceptor assemblies for supporting wafers in a reactor apparatus |
Manabu Hamano |
2016-07-26 |
| 9328420 |
Gas distribution plate for chemical vapor deposition systems and methods of using same |
Manabu Hamano |
2016-05-03 |
| 9193025 |
Single side polishing using shape matching |
Sumeet S. Bhagavat, Khiam-How Low, Ichiron Yoshimura |
2015-11-24 |
| 9117670 |
Inject insert liner assemblies for chemical vapor deposition systems and methods of using same |
Arash Abedijaberi, Shawn George Thomas |
2015-08-25 |
| 8940094 |
Methods for fabricating a semiconductor wafer processing device |
Manabu Hamano |
2015-01-27 |
| 8440541 |
Methods for reducing the width of the unbonded region in SOI structures |
Ichiro Yoshimura, Lu Fei |
2013-05-14 |
| 8404049 |
Epitaxial barrel susceptor having improved thickness uniformity |
Lance G. Hellwig, Srikanth Kommu |
2013-03-26 |
| 8340801 |
Systems for generating representations of flatness defects on wafers |
— |
2012-12-25 |
| 8330245 |
Semiconductor wafers with reduced roll-off and bonded and unbonded SOI structures produced from same |
Ichiro Yoshimura, Lu Fei |
2012-12-11 |
| 8186661 |
Wafer holder for supporting a semiconductor wafer during a thermal treatment process |
Thomas A. Torack |
2012-05-29 |
| 8165706 |
Methods for generating representations of flatness defects on wafers |
— |
2012-04-24 |
| 8080464 |
Methods for processing silicon on insulator wafers |
Swapnil Dhumal, Lawrence P. Flannery, Thomas A. Torack |
2011-12-20 |
| 7878562 |
Semiconductor wafer carrier blade |
Manabu Hamano, Lance G. Hellwig |
2011-02-01 |