| 9129919 |
Production of high precipitate density wafers by activation of inactive oxygen precipitate nuclei |
Robert J. Falster, Vladimir V. Voronkov, Marco Cornara, Massimiliano Olmo |
2015-09-08 |
| 7442253 |
Process for forming low defect density, ideal oxygen precipitating silicon |
Robert J. Falster, Joseph C. Holzer, Marco Cornara, Massimiliano Olmo, Steve A. Markgraf +3 more |
2008-10-28 |
| 7229693 |
Low defect density, ideal oxygen precipitating silicon |
Robert J. Falster, Joseph C. Holzer, Marco Cornara, Massimiliano Olmo, Steve A. Markgraf +3 more |
2007-06-12 |
| 6896728 |
Process for producing low defect density, ideal oxygen precipitating silicon |
Robert J. Falster, Joseph C. Holzer, Marco Cornara, Massimiliano Olmo, Steve A. Markgraf +3 more |
2005-05-24 |
| 6849119 |
Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2005-02-01 |
| 6586068 |
Ideal oxygen precipitating silicon wafer having an asymmetrical vacancy concentration profile and a process for the preparation thereof |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2003-07-01 |
| 6555194 |
Process for producing low defect density, ideal oxygen precipitating silicon |
Robert Falster, Joseph C. Holzer, Marco Cornara, Massimiliano Olmo, Steve A. Markgraf +3 more |
2003-04-29 |
| 6537368 |
Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2003-03-25 |
| 6306733 |
Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2001-10-23 |
| 6204152 |
Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2001-03-20 |
| 6190631 |
Low defect density, ideal oxygen precipitating silicon |
Robert Falster, Joseph C. Holzer, Marco Cornara, Massimiliano Olmo, Steve A. Markgraf +3 more |
2001-02-20 |
| 6180220 |
Ideal Oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
2001-01-30 |
| 5994761 |
Ideal oxygen precipitating silicon wafers and oxygen out-diffusion-less process therefor |
Robert J. Falster, Marco Cornara, Massimiliano Olmo |
1999-11-30 |