Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6911374 | Fabrication method for shallow trench isolation region | Chin-Hsiang Lin, Chin-Wei Liao, Hsueh-Hao Shih | 2005-06-28 |
| 6887757 | Method of manufacturing flash memory | Hsueh-Hao Shih, Ling Yang | 2005-05-03 |
| 6855617 | Method of filling intervals and fabricating shallow trench isolation structures | Chien-Hung Lu, Chin-Ta Su | 2005-02-15 |
| 6824452 | Polishing pad and process of chemical mechanical use thereof | Yung-Tai Hung, Yuhturng Liu, Hsueh-Hao Shih | 2004-11-30 |
| 6812096 | Method for fabrication a flash memory device having self-aligned contact | Ling Yang, Jui-Lin Lu | 2004-11-02 |
| 6677255 | Method for removing fences without reduction of ONO film thickness | Hsueh-Hao Shih | 2004-01-13 |
| 6136688 | High stress oxide to eliminate BPSG/SiN cracking | Keng-Chu Lin, Rong-Wu Chien, Lian-Fa Hung, Pang-Yen Tsai, Ching-Chang Chang | 2000-10-24 |
| 6117755 | Method for planarizing the interface of polysilicon and silicide in a polycide structure | Sung Kun-Yu, Chien-Hung Chen, Yi-Fu Chung | 2000-09-12 |
| 6001745 | Method for forming a VIA in an inter metal dielectric (IMD) containing spin on glass (SOG) | Tuby Tu, Danny Wu | 1999-12-14 |
| 5989971 | Method for forming trenched polysilicon structure | Tuby Tu | 1999-11-23 |
| 5960279 | Method of fabricating a capacitor on a rugged stacked oxide layer | Tuby Tu | 1999-09-28 |
| 5883015 | Method for using oxygen plasma treatment on a dielectric layer | Kent Liao, Dinos Huang, Tuby Tu, Wen-Doe Su | 1999-03-16 |
| 5869394 | Teos-ozone planarization process | Tuby Tu | 1999-02-09 |
| 5869399 | Method for increasing utilizable surface of rugged polysilicon layer in semiconductor device | Tuby Tu | 1999-02-09 |
| 5851867 | Rugged stacked oxide layer structure and method of fabricating same | Tuby Tu | 1998-12-22 |
| 5811344 | Method of forming a capacitor of a dram cell | Tuby Tu, May Wang | 1998-09-22 |
| 5393708 | Inter-metal-dielectric planarization process | Shaw-Tzeng Hsia | 1995-02-28 |
| 5366850 | Submicron planarization process with passivation on metal line | Shaw-Tzeng Hsia | 1994-11-22 |
| 5356836 | Aluminum plug process | Shaw-Tzeng Hsia | 1994-10-18 |
| 5286675 | Blanket tungsten etchback process using disposable spin-on-glass | Shaw-Tzeng Hsia | 1994-02-15 |
| 5250472 | Spin-on-glass integration planarization having siloxane partial etchback and silicate processes | Shaw-Tzeng Hsia | 1993-10-05 |