SH

Shaw-Tzeng Hsia

IT ITRI: 6 patents #1,152 of 9,619Top 15%
VS Vanguard International Semiconductor: 4 patents #151 of 585Top 30%
Overall (All Time): #455,241 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
10609300 Image sensor, operation method thereof, and imaging device Xinhe Feng, Jianguang Chang, Yonggang Wang 2020-03-31
5849640 In-situ SOG etchback and deposition for IMD process Ching-Ying Lee, Chih-Cheng Liao 1998-12-15
5705442 Optimized tungsten contact plug process via use of furnace annealed barrier layers Haw Yen 1998-01-06
5591672 Annealing of titanium - titanium nitride in contact hole Ching-Ying Lee, Haw Yen 1997-01-07
5552340 Nitridation of titanium, for use with tungsten filled contact holes Ching-Ying Lee, Haw Yen 1996-09-03
5461010 Two step etch back spin-on-glass process for semiconductor planarization Lai-Juh Chen 1995-10-24
5393708 Inter-metal-dielectric planarization process Kuang-Chao Chen 1995-02-28
5366850 Submicron planarization process with passivation on metal line Kuang-Chao Chen 1994-11-22
5356836 Aluminum plug process Kuang-Chao Chen 1994-10-18
5286675 Blanket tungsten etchback process using disposable spin-on-glass Kuang-Chao Chen 1994-02-15
5250472 Spin-on-glass integration planarization having siloxane partial etchback and silicate processes Kuang-Chao Chen 1993-10-05