Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7915122 | Self-aligned cell integration scheme | Richard J. Carter, Hemanshu Bhatt, Shiqun Gu, Peter A. Burke, Sey-Shing Sun +2 more | 2011-03-29 |
| 7911034 | Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers | Shiqun Gu, Peter McGrath, Richard J. Carter, Thomas Rueckes | 2011-03-22 |
| 7538040 | Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers | Shiqun Gu, Peter McGrath, Richard J. Carter, Thomas Rueckes | 2009-05-26 |
| 7115425 | Integrated circuit process monitoring and metrology system | Peter A. Burke, Eric Jacob Jan Kirchner | 2006-10-03 |
| 7095483 | Process independent alignment marks | David W. Daniel | 2006-08-22 |
| 7016041 | Reticle overlay correction | Colin D. Yates | 2006-03-21 |
| 6964924 | Integrated circuit process monitoring and metrology system | Peter A. Burke, Eric Jacob Jan Kirchner | 2005-11-15 |
| 6856029 | Process independent alignment marks | David W. Daniel | 2005-02-15 |
| 6818516 | Selective high k dielectrics removal | Wai Lo, Hong Lin, Shiqun Gu | 2004-11-16 |
| 6710851 | Multi pattern reticle | Ann I. Kang | 2004-03-23 |
| 6472316 | Photolithography overlay control | Eric Jacob Jan Kirchner | 2002-10-29 |