| 7323228 |
Method of vaporizing and ionizing metals for use in semiconductor processing |
Sheldon Aronowitz |
2008-01-29 |
| 7084408 |
Vaporization and ionization of metals for use in semiconductor processing |
Sheldon Aronowitz |
2006-08-01 |
| 6864141 |
Method of incorporating nitrogen into metal silicate based dielectrics by energized nitrogen ion beams |
Wai Lo, Verne Hornback |
2005-03-08 |
| 6849512 |
Thin gate dielectric for a CMOS transistor and method of fabrication thereof |
Wai Lo, Verne Hornback |
2005-02-01 |
| 6759337 |
Process for etching a controllable thickness of oxide on an integrated circuit structure on a semiconductor substrate using nitrogen plasma and plasma and an rf bias applied to the substrate |
Sheldon Aronowitz, Valeriy Sukharev, John Haywood, Helmut Puchner, Ravindra M. Kapre +1 more |
2004-07-06 |
| 6413881 |
PROCESS FOR FORMING THIN GATE OXIDE WITH ENHANCED RELIABILITY BY NITRIDATION OF UPPER SURFACE OF GATE OF OXIDE TO FORM BARRIER OF NITROGEN ATOMS IN UPPER SURFACE REGION OF GATE OXIDE, AND RESULTING PRODUCT |
Sheldon Aronowitz, John Haywood, Helmut Puchner, Ravindra M. Kapre, Nicholas K. Eib |
2002-07-02 |
| 6331468 |
Formation of integrated circuit structure using one or more silicon layers for implantation and out-diffusion in formation of defect-free source/drain regions and also for subsequent formation of silicon nitride spacers |
Sheldon Aronowitz, Helmut Puchner, Ravindra Kapre |
2001-12-18 |
| 6180470 |
FETs having lightly doped drain regions that are shaped with counter and noncounter dorant elements |
Sheldon Aronowitz, Laique Khan |
2001-01-30 |
| 6087229 |
Composite semiconductor gate dielectrics |
Sheldon Aronowitz, David Chan, David Lee, John Haywood, Valeriy Sukharev |
2000-07-11 |
| 6060375 |
Process for forming re-entrant geometry for gate electrode of integrated circuit structure |
Jon S. Owyang, Sheldon Aronowitz |
2000-05-09 |
| 6033998 |
Method of forming variable thickness gate dielectrics |
Sheldon Aronowitz, David Chan, David Lee, John Haywood, Valeriy Sukharev |
2000-03-07 |
| 5963801 |
Method of forming retrograde well structures and punch-through barriers using low energy implants |
Sheldon Aronowitz, Laique Khan |
1999-10-05 |
| 5904551 |
Process for low energy implantation of semiconductor substrate using channeling to form retrograde wells |
Sheldon Aronowitz |
1999-05-18 |
| 5858864 |
Process for making group IV semiconductor substrate treated with one or more group IV elements to form barrier region capable of inhibiting migration of dopant materials in substrate |
Sheldon Aronowitz |
1999-01-12 |
| 5739580 |
Oxide formed in semiconductor substrate by implantation of substrate with a noble gas prior to oxidation |
Sheldon Aronowitz |
1998-04-14 |
| 5717238 |
Substrate with controlled amount of noble gas ions to reduce channeling and/or diffusion of a boron dopant forming P-LDD region of a PMOS device |
Sheldon Aronowitz, Yu-Lam Ho, Gobi R. Padmanabhan, Douglas T. Grider, Chi-Yi Kao |
1998-02-10 |
| 5707888 |
Oxide formed in semiconductor substrate by implantation of substrate with a noble gas prior to oxidation |
Sheldon Aronowitz |
1998-01-13 |
| 5654210 |
Process for making group IV semiconductor substrate treated with one or more group IV elements to form one or more barrier regions capable of inhibiting migration of dopant materials in substrate |
Sheldon Aronowitz |
1997-08-05 |
| 5585286 |
Implantation of a semiconductor substrate with controlled amount of noble gas ions to reduce channeling and/or diffusion of a boron dopant subsequently implanted into the substrate to form P- LDD region of a PMOS device |
Sheldon Aronowitz, Yu-Lam Ho, Gobi R. Padmanabhan, Douglas T. Grider, Chi-Yi Kao |
1996-12-17 |