Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8808561 | Inert-dominant pulsing in plasma processing systems | — | 2014-08-19 |
| 8492174 | Etch tool process indicator method and apparatus | Jorge Luque, Nicholas Webb | 2013-07-23 |
| 8206996 | Etch tool process indicator method and apparatus | Jorge Luque, Nicholas Webb | 2012-06-26 |
| 7951616 | Process for wafer temperature verification in etch tools | C. Robert Koemtzopoulos, James Rogers, Bi-Ming Yen | 2011-05-31 |
| 7682480 | Photoresist conditioning with hydrogen ramping | Aaron Eppler | 2010-03-23 |