Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6302966 | Temperature control system for plasma processing apparatus | Andrew D. Bailey, III, Alan M. Schoepp, Michael G. R. Smith | 2001-10-16 |
| 6242360 | Plasma processing system apparatus, and method for delivering RF power to a plasma processing | Andreas Fischer, Babak Kadkhodayan | 2001-06-05 |
| 6106663 | Semiconductor process chamber electrode | Lumin Li | 2000-08-22 |
| 5288969 | Electrodeless plasma torch apparatus and methods for the dissociation of hazardous waste | Alfred Y. Wong | 1994-02-22 |