Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10699873 | Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate | Koji Ashida | 2020-06-30 |
| 10665465 | Surface treatment method for SiC substrate | Koji Ashida, Yasunori Kutsuma, Satoshi Torimi, Masato Shinohara, Youji Teramoto +2 more | 2020-05-26 |
| 10508361 | Method for manufacturing semiconductor wafer | Yasunori Kutsuma, Koji Ashida | 2019-12-17 |
| 10388536 | Etching method for SiC substrate and holding container | Satoshi Torimi, Masato Shinohara, Youji Teramoto, Norihito Yabuki, Satoru Nogami +2 more | 2019-08-20 |
| 10012675 | Nanometer standard prototype and method for manufacturing nanometer standard prototype | Shoji Ushio | 2018-07-03 |
| 9978597 | Method for treating the surface of a silicon-carbide substrate including a removal step in which a modified layer produced by polishing is removed by heating under Si vapor pressure | Noboru Ohtani, Kenta Hagiwara | 2018-05-22 |
| 9941116 | Method for manufacturing silicon-carbide semiconductor element | Noboru Ohtani, Kenta Hagiwara | 2018-04-10 |
| 9656942 | Method of manufacturing diethyl carbonate | Hirofumi Ii, Tatsuya Naitou, Kazuki Yamamoto, Katsuyoshi Kudou, Akira Hino +2 more | 2017-05-23 |
| 9029219 | Semiconductor wafer manufacturing method, and semiconductor wafer | Noboru Ohtani, Shoji Ushio, Ayumu Adachi, Satoru Nogami | 2015-05-12 |
| 8211244 | Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode | Yasushi Asaoka, Naokatsu Sano | 2012-07-03 |
| 8110322 | Method of mask forming and method of three-dimensional microfabrication | Naokatsu Sano | 2012-02-07 |
| 7704861 | Electron beam microprocessing method | Kiyoshi Sakaue, Naokatsu Sano | 2010-04-27 |
| 7637998 | Method for producing single crystal silicon carbide | Yasushi Asaoka, Naokatsu Sano | 2009-12-29 |
| 7527869 | Single crystal silicon carbide and method for producing the same | Yasushi Asaoka, Naokatsu Sano | 2009-05-05 |
| 7432176 | Method of three-dimensional microfabrication and high-density three-dimentional fine structure | Naokatsu Sano, Kiyoshi Sakaue | 2008-10-07 |
| 5869400 | Method for dry-etching using gaseous bismuth halide compound | Takaaki Kawamura | 1999-02-09 |