Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7704861 | Electron beam microprocessing method | Tadaaki Kaneko, Naokatsu Sano | 2010-04-27 |
| 7432176 | Method of three-dimensional microfabrication and high-density three-dimentional fine structure | Tadaaki Kaneko, Naokatsu Sano | 2008-10-07 |
| 4949153 | Semiconductor IC device with polysilicon resistor | Tadashi Hirao, Hisao Yakushiji, Saburo Ohsaki | 1990-08-14 |