Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885961 | Partly disappearing targets | — | 2018-02-06 |
| 9841370 | Multi-layered target design | — | 2017-12-12 |
| 9760020 | In-situ metrology | — | 2017-09-12 |
| 9753364 | Producing resist layers using fine segmentation | — | 2017-09-05 |
| 9740108 | Scatterometry overlay metrology targets and methods | — | 2017-08-22 |
| 9329033 | Method for estimating and correcting misregistration target inaccuracy | Eran Amit, Dana Klein, Guy M. Cohen, Amir Widmann, Nimrod Shuall +1 more | 2016-05-03 |
| 9093458 | Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets | DongSub Choi, Tal Itzkovich, Daniel Kandel | 2015-07-28 |
| 8569103 | Selective polymer growth on a semiconductor substrate | Eyal Bar-Sadeh, Alexander Ripp, Yakov Shor, Dror Horvitz | 2013-10-29 |
| 8183085 | High rate selective polymer growth on a substrate | Eyal Bar-Sadeh, Alexander Ripp, Yakov Shor, Dror Horvitz | 2012-05-22 |
| 8169833 | Partitioning process to improve memory cell retention | Shaul Halabi, Yaniv Sasson | 2012-05-01 |