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2014-08-19 |
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Filling cavities in semiconductor structures having adhesion promoting layer in the cavities |
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2014-07-08 |
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Selective polymer growth on a semiconductor substrate |
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Barrier layer for integrated circuit contacts |
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2013-06-11 |
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Method of high aspect ratio plug fill |
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2012-08-07 |
| 8183085 |
High rate selective polymer growth on a substrate |
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2012-05-22 |
