MS

Mark D. Smith

KL Kla-Tencor: 19 patents #73 of 1,394Top 6%
KL Kla: 8 patents #28 of 758Top 4%
📍 San Jose, CA: #2,291 of 32,062 inventorsTop 8%
🗺 California: #19,737 of 386,348 inventorsTop 6%
Overall (All Time): #140,687 of 4,157,543Top 4%
27
Patents All Time

Issued Patents All Time

Showing 26–27 of 27 patents

Patent #TitleCo-InventorsDate
7925486 Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout Robert Hardister, Mike Pochkowski, Amir Widmann, Elyakim Kassel, Mike Adel 2011-04-12
7528953 Target acquisition and overlay metrology based on two diffracted orders imaging Aviv Frommer, Vladimir Levinski, Jeffrey Byers, Chris Mack, Michael Adel 2009-05-05