Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216451 | Robot system | Haruhiko TAN, Masahiko Sumitomo, Junichi Sugahara, Nobuyasu Shimomura | 2025-02-04 |
| 12162145 | Substrate conveying robot and substrate conveying robot system | Haruhiko TAN, Shota TOMINAGA, Simon Jeyapalan | 2024-12-10 |
| 12148646 | Aligner apparatus | Haruhiko TAN, George Chin, Simon Jeyapalan | 2024-11-19 |
| 12046501 | Substrate handling apparatus and method of handling substrate | Haruhiko TAN, Simon Jeyapalan, Mu-Kai LIN | 2024-07-23 |
| 12002695 | Transport system and determination method | Haruhiko TAN, Simon Jeyapalan | 2024-06-04 |
| 11926039 | Robot | Haruhiko TAN, Hajime Nakahara, Ming Zeng | 2024-03-12 |
| 11862507 | Robot system, and slip determination method | Masaya Yoshida, Simon Jeyapalan | 2024-01-02 |
| 11427412 | Substrate conveying robot and substrate conveying method | Masaya Yoshida, Ming Zeng, Brandon J. Lee, Ryan Le | 2022-08-30 |
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Ming Zeng, Simon Jeyapalan, Hajime Nakahara | 2022-05-17 |
| 11207775 | Method of teaching robot | Takeshi Shibata, Yukimasa Yamada, Takao Yamaguchi, Tomokazu Arita, Eric Chan +3 more | 2021-12-28 |
| 10636693 | Substrate transfer device and control method therefor | Tetsuya Yoshida, Ming Zeng | 2020-04-28 |
| 10391640 | Robot | Tetsuya Yoshida | 2019-08-27 |
| 10020216 | Robot diagnosing method | Kazuo Fujimori, Hajime Nakahara, Ming Zeng, Tomokazu Arita | 2018-07-10 |
| 10014205 | Substrate conveyance robot and operating method thereof | Masaya Yoshida, Takao Yamaguchi, Yuji Tanaka, Hajime Nakahara, Ming Zeng +1 more | 2018-07-03 |
| 9929034 | Substrate transfer device | Hirohiko Goto, Ming Zeng, Shigeki Ono | 2018-03-27 |
| 9002504 | Method of wafer system interlock for the protection of equipment and product in semiconductor processing bridge tool | Thomas Miu, Shinya Kitano, Simon Jeyapalan, Ming Zeng | 2015-04-07 |