Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398000 | Substrate conveying robot system | Haruhiko TAN, Masaya Yoshida, Masahiko Sumitomo | 2025-08-26 |
| 12162145 | Substrate conveying robot and substrate conveying robot system | Haruhiko TAN, Avish Ashok Bharwani, Simon Jeyapalan | 2024-12-10 |
| 11328947 | Aligner apparatus and alignment method | Haruhiko TAN, Hajime Nakahara, Hiroyuki Yoshida | 2022-05-10 |
| 11330725 | Housing | Haruhiko TAN | 2022-05-10 |