Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334387 | Substrate transfer apparatus | Masaya Yoshida, Yuji Tanaka | 2025-06-17 |
| 11926039 | Robot | Haruhiko TAN, Avish Ashok Bharwani, Ming Zeng | 2024-03-12 |
| 11845179 | Wafer jig, robot system, communication method, and robot teaching method | Haruhiko TAN | 2023-12-19 |
| 11654578 | Robot system and offset acquisition method | Masaya Yoshida, George Chin, Luc Nguyen | 2023-05-23 |
| 11554498 | Wafer jig, robot system, communication method, and robot teaching method | Masaya Yoshida | 2023-01-17 |
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Avish Ashok Bharwani, Ming Zeng, Simon Jeyapalan | 2022-05-17 |
| 11328947 | Aligner apparatus and alignment method | Haruhiko TAN, Shota TOMINAGA, Hiroyuki Yoshida | 2022-05-10 |
| 11315823 | Substrate suction-holding structure and substrate transfer robot | Masaya Yoshida | 2022-04-26 |
| 11207775 | Method of teaching robot | Takeshi Shibata, Yukimasa Yamada, Takao Yamaguchi, Tomokazu Arita, Eric Chan +3 more | 2021-12-28 |
| 11059178 | Method of correcting position of robot and robot | Masaya Yoshida, Takao Yamaguchi, Daniel Chung | 2021-07-13 |
| 10974388 | Method of correcting position of robot and robot | Masaya Yoshida, Takao Yamaguchi, Daniel Chung | 2021-04-13 |
| 10953539 | Substrate transfer robot and automatic teaching method | Masaya Yoshida, Mark TANG | 2021-03-23 |
| 10549427 | Substrate transfer robot | Tetsuya Yoshida, Ming Zeng | 2020-02-04 |
| 10403539 | Robot diagnosing method | Tetsuya Yoshida, Ming Zeng, Antonio John Lozano, Tomozaku Arita | 2019-09-03 |
| 10020216 | Robot diagnosing method | Kazuo Fujimori, Avish Ashok Bharwani, Ming Zeng, Tomokazu Arita | 2018-07-10 |
| 10014205 | Substrate conveyance robot and operating method thereof | Masaya Yoshida, Takao Yamaguchi, Yuji Tanaka, Avish Ashok Bharwani, Ming Zeng +1 more | 2018-07-03 |
| 9796086 | Method of teaching robot and robot | Atsushi Nakaya, Takao Yamaguchi, George Chin | 2017-10-24 |