Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10953539 | Substrate transfer robot and automatic teaching method | Masaya Yoshida, Hajime Nakahara | 2021-03-23 |
| 10867821 | Substrate transfer robot and method of teaching edge position of target body | Tetsuya Yoshida | 2020-12-15 |
| 10381257 | Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction | Eric Chan, Shigeki Ono, Shinya Kitano, Ming Zeng, Hirohiko Goto | 2019-08-13 |
| 9550217 | Exhaust component cleaning and requalification process | Todd M. Wieland, Leslie E. Freeman, David G. Eames, Duane J. Szymanski, William A. MacGregor +1 more | 2017-01-24 |