Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476138 | Diagnostic system of substrate transfer hand | Tetsuya Yoshida, Haruhiko TAN, Kazuo Fujimori, Katsuhiro Yamashita, Masahiko Sumitomo | 2022-10-18 |
| 11203121 | Robot, control device of robot, and method of teaching position of robot | Tetsuya Yoshida, Haruhiko TAN, Kazuo Fujimori, Katsuhiro Yamashita, Masahiko Sumitomo | 2021-12-21 |
| 11110599 | Robot, control device of robot, and method of teaching position of robot | Tetsuya Yoshida, Haruhiko TAN, Kazuo Fujimori, Katsuhiro Yamashita, Masahiko Sumitomo | 2021-09-07 |
| 10479362 | Autonomous driving assistance system, autonomous driving assistance method, and computer program | Yuji Sato, Kuniaki Tanaka, Masaki Takano | 2019-11-19 |
| 10431482 | Substrate conveyance robot and substrate detection method | — | 2019-10-01 |
| 10403530 | Substrate conveying robot and substrate processing system | — | 2019-09-03 |
| 10399571 | Autonomous driving assistance system, autonomous driving assistance method, and computer program | Yuji Sato, Kuniaki Tanaka, Masaki Takano | 2019-09-03 |
| 10395956 | Substrate transfer apparatus and method of teaching substrate transfer robot | Masaya Yoshida, Hiroyuki Okada, Takayuki Fukushima | 2019-08-27 |
| 10381257 | Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction | Mark TANG, Eric Chan, Shigeki Ono, Shinya Kitano, Ming Zeng | 2019-08-13 |
| 10300916 | Autonomous driving assistance system, autonomous driving assistance method, and computer program | Yuji Sato, Kuniaki Tanaka, Masaki Takano | 2019-05-28 |
| 10269613 | Substrate conveying robot and method of operating the same | Isao Kato, Iori KURATA, Masayuki Saito | 2019-04-23 |
| 10083851 | Robot with inner and outer belt sections | Takahiro Inada, Masayuki Saito, Takeshi Shibata, Takayuki Fukushima | 2018-09-25 |
| 9947566 | Substrate angle alignment device, substrate angle alignment method, and substrate transfer method | — | 2018-04-17 |
| 9929034 | Substrate transfer device | Ming Zeng, Avish Ashok Bharwani, Shigeki Ono | 2018-03-27 |
| 9905446 | Substrate transferring apparatus | — | 2018-02-27 |
| 9797736 | Drive assist system, method, and program | Masatoshi Takahara | 2017-10-24 |
| 9786172 | Warning guidance system, method, and program that provide information to vehicle navigation systems | Masatoshi Takahara | 2017-10-10 |
| 9368381 | Transfer robot, its substrate transfer method and substrate transfer relay device | — | 2016-06-14 |
| 8747049 | Transferring apparatus | — | 2014-06-10 |
| 8615350 | Guidance device, guidance method, and guidance program | Toshiaki Niwa | 2013-12-24 |
| 8504269 | Driving support system, method, and program | Takashi Hayashi | 2013-08-06 |
| 7260448 | Substrate holding device | Shiro Oda | 2007-08-21 |
| 7043335 | Mapping device | Tetsuya Yoshida | 2006-05-09 |