Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031269 | Substrate transport robot, substrate transport system, and substrate transport method | Junichi Matsuoka, Tomokazu Arita | 2021-06-08 |
| 10947860 | Actuator | — | 2021-03-16 |
| 10269613 | Substrate conveying robot and method of operating the same | Isao Kato, Masayuki Saito, Hirohiko Goto | 2019-04-23 |
| 9217394 | Multi-stage supercharging apparatus | Shinobu Uno, Kazutaka Ooishi | 2015-12-22 |