Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162145 | Substrate conveying robot and substrate conveying robot system | Haruhiko TAN, Shota TOMINAGA, Avish Ashok Bharwani | 2024-12-10 |
| 12148646 | Aligner apparatus | Haruhiko TAN, Avish Ashok Bharwani, George Chin | 2024-11-19 |
| 12046501 | Substrate handling apparatus and method of handling substrate | Haruhiko TAN, Avish Ashok Bharwani, Mu-Kai LIN | 2024-07-23 |
| 12002695 | Transport system and determination method | Haruhiko TAN, Avish Ashok Bharwani | 2024-06-04 |
| 11862507 | Robot system, and slip determination method | Masaya Yoshida, Avish Ashok Bharwani | 2024-01-02 |
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Avish Ashok Bharwani, Ming Zeng, Hajime Nakahara | 2022-05-17 |
| 9002504 | Method of wafer system interlock for the protection of equipment and product in semiconductor processing bridge tool | Thomas Miu, Shinya Kitano, Ming Zeng, Avish Ashok Bharwani | 2015-04-07 |