Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8759971 | Semiconductor apparatus | Ryuji Hosokawa, Tsutomu Kojima | 2014-06-24 |
| 8704367 | Semiconductor device and manufacturing method of semiconductor device | Tatsuo Migita, Hirokazu Ezawa, Soichi Yamashita, Koro Nagamine, Masahiro Miyata +1 more | 2014-04-22 |
| 5383984 | Plasma processing apparatus etching tunnel-type | Yutaka Shimada, Hitoshi Kato, Junichi Kakizaki, Kazutugu Aoki, Haruki Mori | 1995-01-24 |