Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5383984 | Plasma processing apparatus etching tunnel-type | Yutaka Shimada, Hitoshi Kato, Junichi Kakizaki, Haruki Mori, Tatsuo Shiotsuki | 1995-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5383984 | Plasma processing apparatus etching tunnel-type | Yutaka Shimada, Hitoshi Kato, Junichi Kakizaki, Haruki Mori, Tatsuo Shiotsuki | 1995-01-24 |