Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5878191 | Heat treatment apparatus for semiconductor wafers | Ichiro Katakabe, Hiroshi Kawamoto, Kenji Doi, Tsuyoshi Okuda | 1999-03-02 |
| 5861054 | Polishing slurry | Masahiro Abe, Mariko Shimomura | 1999-01-19 |
| 5858859 | Semiconductor device having a trench for device isolation fabrication method | Koichi Takahashi | 1999-01-12 |
| 5683908 | Method of fabricating trench isolation structure having tapered opening | Koichi Takahashi | 1997-11-04 |
| 5643046 | Polishing method and apparatus for detecting a polishing end point of a semiconductor wafer | Ichiro Katakabe, Tatsuo Akiyama | 1997-07-01 |
| 5643406 | Chemical-mechanical polishing (CMP) method for controlling polishing rate using ionized water, and CMP apparatus | Mariko Shimomura, Hiroyuki Ohashi | 1997-07-01 |
| 5605488 | Polishing apparatus of semiconductor wafer | Hiroyuki Ohashi, Ichiro Katakabe, Tetsuya Tsukihara | 1997-02-25 |
| 5589421 | Method of manufacturing annealed films | Koichi Takahashi, Mitsutoshi Koyama, Shinji Nunotani, Satoshi Yanagiya, Yoshiro Baba | 1996-12-31 |
| 5434447 | Semiconductor device having a trench for device isolation and method of fabricating the same | Koichi Takahashi | 1995-07-18 |
| 5380399 | Method of treating semiconductor substrates | Koichi Takahashi, Mitsutoshi Koyama | 1995-01-10 |
| 5346555 | Device for thermal treatment and film forming process | Shinji Nunotani, Koichi Takahashi | 1994-09-13 |
| 5332683 | Method of manufacturing semiconductor device having elements isolated by trench | Koichi Takahashi, Hironori Sonobe | 1994-07-26 |
| 5111272 | Semiconductor device having element regions electrically isolated from each other | Koichi Takahashi, Hironori Sonobe, Mitsutoshi Koyama | 1992-05-05 |
| 5029554 | Semiconductor manufacturing apparatus including a temperature control mechanism | Koichi Takahashi, Hiroshi Kinoshita | 1991-07-09 |
| 4916086 | Method of manufacturing a semiconductor device having rounded trench corners | Kouichi Takahashi, Hiroshi Kinoshita, Hironori Sonobe | 1990-04-10 |