Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6098638 | Method of manufacturing a semiconductor device and an apparatus for manufacturing the same | Naoto Miyashita, Jun Takayasu | 2000-08-08 |
| 6069083 | Polishing method, semiconductor device fabrication method, and semiconductor fabrication apparatus | Naoto Miyashita, Masahiro Abe | 2000-05-30 |
| 5968239 | Polishing slurry | Naoto Miyashita, Masahiro Abe | 1999-10-19 |
| 5922620 | Chemical-mechanical polishing (CMP) method for controlling polishing rate using ionized water, and CMP apparatus | Naoto Miyashita, Hiroyuki Ohashi | 1999-07-13 |
| 5861054 | Polishing slurry | Naoto Miyashita, Masahiro Abe | 1999-01-19 |
| 5643406 | Chemical-mechanical polishing (CMP) method for controlling polishing rate using ionized water, and CMP apparatus | Naoto Miyashita, Hiroyuki Ohashi | 1997-07-01 |