Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10441979 | Cleaning apparatus and cleaning method | Jun Takagi, Dai Fukushima | 2019-10-15 |
| 10249518 | Polishing device and polishing method | Masayoshi Adachi | 2019-04-02 |
| 9947555 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Takashi Watanabe, Takayuki Nakayama | 2018-04-17 |
| 9902038 | Polishing apparatus, polishing method, and semiconductor manufacturing method | Dai Fukushima | 2018-02-27 |
| 9539696 | Retainer ring, polish apparatus, and polish method | Dai Fukushima, Takashi Watanabe | 2017-01-10 |
| 9502318 | Polish apparatus, polish method, and method of manufacturing semiconductor device | Dai Fukushima, Takashi Watanabe | 2016-11-22 |
| 9296083 | Polishing apparatus and polishing method | Dai Fukushima, Takashi Watanabe | 2016-03-29 |
| 8823079 | Semiconductor device and method for manufacturing same | Takashi Watanabe | 2014-09-02 |
| 7037839 | Method for polishing organic film on semiconductor substrate by use of resin particles, and slurry | Satoshi Murakami | 2006-05-02 |
| 6878631 | Abrasive used for planarization of semiconductor device and method of manufacturing semiconductor device using the abrasive | — | 2005-04-12 |
| 6723226 | Method and apparatus for forming electrolytic water and apparatus for washing semiconductor substrate using electrolytic water-forming apparatus | Naoto Miyashita, Mikiko Kawaguchi | 2004-04-20 |
| 6354913 | Abrasive and method for polishing semiconductor substrate | Naoto Miyashita, Yoshihiro Minami, Kenji Doi, Hiroyuki Kohno, Hiroshi Kato +1 more | 2002-03-12 |
| 6098638 | Method of manufacturing a semiconductor device and an apparatus for manufacturing the same | Naoto Miyashita, Mariko Shimomura | 2000-08-08 |
| 6007696 | Apparatus and method for manufacturing electrolytic ionic water and washing method using electroyltic ionic water | Naoto Miyashita | 1999-12-28 |
| 6001238 | Method for purifying pure water and an apparatus for the same | Naoto Miyashita | 1999-12-14 |
| 5665464 | Carbon fiber-reinforced carbon composite material and process for the preparation thereof | Kazuyuki Murakami, Eiki Tsushima, Takayuki Izumi | 1997-09-09 |