Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12318888 | Polishing apparatus and polishing method | Takeshi Kikuchi, Takayuki Nakayama, Daisuke Sugiyama | 2025-06-03 |
| 10493592 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Jun Takagi | 2019-12-03 |
| 10249518 | Polishing device and polishing method | Jun Takayasu | 2019-04-02 |
| 9960071 | Polishing apparatus and semiconductor manufacturing method | Takayuki Nakayama | 2018-05-01 |
| 8735905 | Method for producing aluminum nitride crystals | Hiroyuki Fukuyama, Akikazu Tanaka, Kazuo Maeda | 2014-05-27 |