Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7877157 | Evaluation support apparatus and method for evaluation of recyclability/environmental load | Toshimitsu Kumazawa | 2011-01-25 |
| 7340351 | Evaluation support apparatus and method for evaluation of recyclability/environmental load | Toshimitsu Kumazawa | 2008-03-04 |
| 6332909 | Processing apparatus, processing system and processing method | Kouichi Teshima, Tomohiro Todoroki, Terunobu Hayata, Fuminobu Tezuka, Masao Koyama +4 more | 2001-12-25 |
| RE35821 | Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer | Hirokazu Niki, Rumiko Hayase, Yasunobu Onishi, Akitoshi Kumagae, Kazuo Sato +2 more | 1998-06-09 |
| 5744281 | Resist composition for forming a pattern and method of forming a pattern wherein the composition 4-phenylpyridine as an additive | Hirokazu Niki, Hiromitsu Wakabayashi, Rumiko Hayase, Yasunobu Onishi, Kazuo Sato +2 more | 1998-04-28 |
| 5658706 | Resist composition for forming a pattern comprising a pyridinium compound as an additive | Hirokazu Niki, Hiromitsu Wakabayashi, Rumiko Hayase, Yasunobu Onishi, Kazuo Sato +2 more | 1997-08-19 |
| 5518864 | Method of forming polyimide film pattern | Masayuki Oba, Rumiko Hayase, Naoko Kihara, Shuzi Hayase, Yukihiro Mikogami +3 more | 1996-05-21 |
| 5403695 | Resist for forming patterns comprising an acid generating compound and a polymer having acid decomposable groups | Rumiko Hayase, Yasunobu Onishi, Hirokazu Niki, Yoshihito Kobayashi, Shuzi Hayase | 1995-04-04 |
| 5348835 | Photosensitive resin composition for forming polyimide film pattern comprising an o-quinone diazide photosensitive agent | Masayuki Oba, Rumiko Hayase, Naoko Kihara, Shuzi Hayase, Yukihiro Mikogami +3 more | 1994-09-20 |
| 5326675 | Pattern forming method including the formation of an acidic coating layer on the radiation-sensitive layer | Hirokazu Niki, Rumiko Hayase, Yasunobu Onishi, Akitoshi Kumagae, Kazuo Sato +2 more | 1994-07-05 |