Issued Patents All Time
Showing 76–100 of 138 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770402 | Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same | Takeshi Shibata, Kazuyoshi Sugihara, Kouji Matsuo | 2004-08-03 |
| 6770519 | Semiconductor manufacturing method using two-stage annealing | Takayuki Ito | 2004-08-03 |
| 6770944 | Semiconductor device having counter and channel impurity regions | Kazumi Nishinohara, Yasushi Akasaka | 2004-08-03 |
| 6767796 | Method of manufacturing semiconductor device and the semiconductor device | Masayuki Tanaka, Kazuaki Nakajima, Yoshitaka Tsunashima, Takayuki Ito | 2004-07-27 |
| 6737724 | Semiconductor device and method of manufacturing the same | Katsuhiko Hieda | 2004-05-18 |
| 6737716 | Semiconductor device and method of manufacturing the same | Kouji Matsuo, Tomohiro Saito, Shinichi Nakamura | 2004-05-18 |
| 6730581 | Semiconductor device and method of manufacture thereof | — | 2004-05-04 |
| 6720657 | Semiconductor device and method of manufacturing the same | — | 2004-04-13 |
| 6693023 | Ion implantation method and ion implantation equipment | Atsushi Murakoshi | 2004-02-17 |
| 6646268 | Ion generation method and filament for ion generation apparatus | Atsushi Murakoshi, Katsuya Okumura | 2003-11-11 |
| 6614033 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Atsushi Murakoshi, Katsuya Okumura | 2003-09-02 |
| 6607958 | Semiconductor device and method of manufacturing the same | — | 2003-08-19 |
| 6586837 | Sputtering target and method of manufacturing a semiconductor device | — | 2003-07-01 |
| 6570169 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Katsuya Okumura | 2003-05-27 |
| 6541829 | Semiconductor device and method of manufacturing the same | Kazumi Nishinohara, Yasushi Akasaka | 2003-04-01 |
| 6541393 | Method for fabricating semiconductor device | Taro Sugizaki, Toshiro Nakanishi, Atsushi Murakoshi | 2003-04-01 |
| 6482714 | Semiconductor device and method of manufacturing the same | Katsuhiko Hieda | 2002-11-19 |
| 6476454 | Semiconductor device and method of manufacturing the same | — | 2002-11-05 |
| 6465290 | Method of manufacturing a semiconductor device using a polymer film pattern | Kouji Matsuo, Atsushi Murakoshi, Yasuhiko Sato, Hiromi Niiyama | 2002-10-15 |
| 6403452 | Ion implantation method and ion implantation equipment | Atsushi Murakoshi | 2002-06-11 |
| 6376888 | Semiconductor device and method of manufacturing the same | Yoshitaka Tsunashima, Atsushi Murakoshi, Kouji Matsuo, Toshihiko Iinuma | 2002-04-23 |
| 6365492 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Katsuya Okumura | 2002-04-02 |
| 6346438 | Method of manufacturing a semiconductor device | Atsushi Yagishita, Kouji Matsuo, Yasushi Akasaka, Yoshitaka Tsunashima | 2002-02-12 |
| 6335534 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Atsushi Murakoshi, Katsuya Okumura | 2002-01-01 |
| 6335241 | Semiconductor device and manufacturing method thereof | Katsuhiko Hieda, Soichi Yamazaki, Kazuhiro Eguchi | 2002-01-01 |