Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7198552 | Polishing apparatus | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2007-04-03 |
| 6997782 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2006-02-14 |
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2002-12-31 |
| 5846335 | Method for cleaning workpiece | Toshiro Maekawa, Koji Ono, Motoaki Okada, Tamami Takahashi, Shiro Mishima +3 more | 1998-12-08 |
| 5704827 | Polishing apparatus including cloth cartridge connected to turntable | Toyomi Nishi, Manabu Tsujimura, Tamami Takahashi, Hiromi Yajima, Riichiro Aoki +4 more | 1998-01-06 |
| 5679059 | Polishing aparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 1997-10-21 |
| 5520501 | Wafer holding apparatus | Takuji Ashikari | 1996-05-28 |