Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417898 | Substrate processing apparatus | Seung Youb SA, Kwang Su Park, Ho Boem Her | 2025-09-16 |
| 12381067 | Substrate processing apparatus | Min Ho CHEON | 2025-08-05 |
| 12371786 | Substrate processing method | Il Hyong CHO, Duck Ho KIM | 2025-07-29 |
| 12334329 | Substrate processing method | Ji Hoon Kim | 2025-06-17 |
| 12255262 | Method for manufacturing solar cell | Jungbae Kim, Junyoung Kang, HyangJu Mun, SeonKi Min, Jeongho Seo +4 more | 2025-03-18 |
| 12198901 | Method for cleaning chamber of substrate processing apparatus | Yong Hyun Kim, Yoon J. Kim, Chang Kyun PARK, Jae Wan Lee | 2025-01-14 |
| 12188126 | Substrate processing apparatus | Jae Wan Lee, Yong Hyun Kim, Yoon J. Kim, Yun Hoe KIM, Chang Kyun PARK +3 more | 2025-01-07 |
| 12170221 | Apparatus for processing substrate | Won Woo Jung, Young Rok Kim, Yoo Seong Kim, Jong Sik Kim | 2024-12-17 |
| 12142515 | Substrate processing apparatus | Donghyuk Oh, Su-Young Kwon, Jongsik Kim | 2024-11-12 |
| 12106941 | Substrate processing device and substrate processing method | — | 2024-10-01 |
| 12032013 | Substrate inspection device and substrate inspection method | Gu Hyun JUNG, Young Rok Kim, Se-Yong Oh, Jin An JUNG | 2024-07-09 |
| 12024774 | Apparatus for supplying gas and apparatus for processing substrate using the same | Ki Bum Kim, Yun Gyu HA, Jong Sik Kim, Il Hyung Cho | 2024-07-02 |
| 11970770 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Heon Do Kim | 2024-04-30 |
| 11837445 | Substrate processing device and substrate processing method | — | 2023-12-05 |
| 11726134 | Substrate inspection device and substrate inspection method | Gu Hyun JUNG, Young Rok Kim, Se-Yong Oh, Jin An JUNG | 2023-08-15 |
| 11651941 | Apparatus for distributing gas, and apparatus and method for processing substrate | Min Ho CHEON, Jong Sik Kim | 2023-05-16 |
| 11469135 | Substrate placing part that is arranged in substrate processing apparatus | Ho Chul Kang | 2022-10-11 |
| 11417562 | Substrate supporting apparatus | Dong Seok Chun, Jeong Mi Kim, Jong Sik Kim, Won Woo Jung, Min Ho CHEON | 2022-08-16 |
| 11371142 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Heon Do Kim | 2022-06-28 |
| 10808315 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Heon Do Kim | 2020-10-20 |
| 10504701 | Substrate processing device and substrate processing method | Jeung Hoon Han, Seung Hoon Seo, Sang Don Lee | 2019-12-10 |
| 10373821 | Substrate processing method | Seung Chul Shin, Jin-Hyuk Yoo, Min Ho CHEON | 2019-08-06 |
| 10202690 | Substrate treating apparatus and method | Jeung Hoon Han, Young-Hoon Kim, Seung Hoon Seo | 2019-02-12 |
| 9748077 | Substrate processing device and substrate processing method | Jeung Hoon Han, Seung Hoon Seo, Sang Don Lee | 2017-08-29 |
| 8545159 | Apparatus having conveyor and method of transferring substrate using the same | Yong Jin Kim | 2013-10-01 |