Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970770 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Chul Joo HWANG | 2024-04-30 |
| 11371142 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Chul Joo HWANG | 2022-06-28 |
| 10808315 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Chul Joo HWANG | 2020-10-20 |
| 6475913 | Method for forming damascene type of metal wires in semiconductor devices | — | 2002-11-05 |
| 6423637 | Method of manufacturing copper wiring in a semiconductor device | — | 2002-07-23 |
| 6346478 | Method of forming a copper wiring in a semiconductor device | Sung Gyu Pyo | 2002-02-12 |
| 6316355 | Method for forming metal wire using titanium film in semiconductor device having contact holes | — | 2001-11-13 |
| 5985758 | Method for forming metal lines of semiconductor devices | — | 1999-11-16 |
| 5911857 | Method for forming metal wiring of semiconductor devices | — | 1999-06-15 |
| 5490901 | Method for forming a contact hole in a semiconductor device | — | 1996-02-13 |
| 5200030 | Method for manufacturing a planarized metal layer for semiconductor device | Gyung-Su Cho, Chul G. Ko | 1993-04-06 |