Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600512 | Substrate processing apparatus and rotating electrical connector for vacuum | Ho Bin YOON, Seung Chul Shin | 2023-03-07 |
| 11469130 | Substrate processing apparatus and rotating electrical connector for vacuum | Ho Bin YOON, Seung Chul Shin | 2022-10-11 |
| 11361984 | Substrate processing apparatus | Seung Chul Shin, Min Su Lee, Dong Hwan Choi | 2022-06-14 |
| 10797051 | Semiconductor device and method of manufacturing the same | Yoonjae Kim, Cheol Kyu Kim, Yong-Hoon Son, Woojin Jung | 2020-10-06 |
| 10553582 | Semiconductor device and method of manufacturing the same | Yoonjae Kim, Cheol Kyu Kim, Yong-Hoon Son, Woojin Jung | 2020-02-04 |
| 10373821 | Substrate processing method | Seung Chul Shin, Min Ho CHEON, Chul Joo HWANG | 2019-08-06 |
| 10291094 | Motor frame | Yun Bum Park, Kwang-Jin Han, Young Hoon Jung | 2019-05-14 |
| 10043879 | Semiconductor devices utilizing capping layers with multiple widths and methods of manufacturing the same | Yoon Jae Kim, Ho-Young Kim, Dong-Kwon Kim, Woo-Jin Jung | 2018-08-07 |
| 9899404 | Semiconductor device | Dae-hyun Jang, Yoo-Chul Kong, Kyoung-Sub Shin | 2018-02-20 |
| 9214409 | Semiconductor device | Dae-hyun Jang, Yoo-Chul Kong, Kyoung-Sub Shin | 2015-12-15 |
| 8039406 | Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same | Jeong-Hoon Han, Young Rok Kim | 2011-10-18 |
| 8017485 | Methods of fabricating a semiconductor device | Du-Hyun Cho, Tae-hyuk Ahn, Sang-Sup Jeong | 2011-09-13 |
| 7866341 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same | Hong-Seub Kim, Hyun Soo Park, Soon-Bin Jung, Sung-Ho CHA, Dong Jin Kim +1 more | 2011-01-11 |
| 7695231 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same | Hong-Seub Kim, Hyun Soo Park, Soon-Bin Jung, Sung-Ho CHA, Dong Jin Kim +1 more | 2010-04-13 |
| 7605084 | Method of gap-filling using amplitude modulation radio frequency power | Jeong-Hoon Han, Young Rok Kim | 2009-10-20 |