Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381067 | Substrate processing apparatus | Chul Joo HWANG | 2025-08-05 |
| 11651941 | Apparatus for distributing gas, and apparatus and method for processing substrate | Jong Sik Kim, Chul Joo HWANG | 2023-05-16 |
| 11417562 | Substrate supporting apparatus | Dong Seok Chun, Jeong Mi Kim, Jong Sik Kim, Won Woo Jung, Chul Joo HWANG | 2022-08-16 |
| 10373821 | Substrate processing method | Seung Chul Shin, Jin-Hyuk Yoo, Chul Joo HWANG | 2019-08-06 |