Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417898 | Substrate processing apparatus | Kwang Su Park, Ho Boem Her, Chul Joo HWANG | 2025-09-16 |
| 12188126 | Substrate processing apparatus | Jae Wan Lee, Yong Hyun Kim, Yoon J. Kim, Yun Hoe KIM, Chang Kyun PARK +3 more | 2025-01-07 |
| 10818534 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Ram WOO, Myung-jin Lee, Seung Dae CHOI, Jong Sung Choi +1 more | 2020-10-27 |
| 10229849 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Ram WOO, Myung-jin Lee, Seung Dae CHOI, Jong Sung Choi +1 more | 2019-03-12 |