Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11028481 | Substrate treating apparatus and method | Chui Joo Hwang, Young-Hoon Kim, Seung Hoon Seo | 2021-06-08 |
| 10504701 | Substrate processing device and substrate processing method | Chul Joo HWANG, Seung Hoon Seo, Sang Don Lee | 2019-12-10 |
| 10202690 | Substrate treating apparatus and method | Chul Joo HWANG, Young-Hoon Kim, Seung Hoon Seo | 2019-02-12 |
| D830981 | Susceptor for semiconductor substrate processing apparatus | Sang Jin Jeong, Young Seok Choi, Ju Hyuk Park | 2018-10-16 |
| 9960073 | Substrate processing apparatus and substrate processing method | Song Whe Huh | 2018-05-01 |
| 9748077 | Substrate processing device and substrate processing method | Chul Joo HWANG, Seung Hoon Seo, Sang Don Lee | 2017-08-29 |
| 9387510 | Substrate processing apparatus and substrate processing method | Song Whe Huh | 2016-07-12 |