Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230531 | Substrate supporting apparatus, substrate processing apparatus including the same, and substrate processing method | Seung Woo Choi, Seung Hwan Lee | 2025-02-18 |
| D948463 | Susceptor for semiconductor substrate supporting apparatus | Seung Hwan Lee, Hak Yong Kwon, Jong Su Kim, Sung-Bae Kim | 2022-04-12 |
| D830981 | Susceptor for semiconductor substrate processing apparatus | Sang Jin Jeong, Jeung Hoon Han, Young Seok Choi | 2018-10-16 |