Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429496 | Arrangement for and method of determining cantilever deflection in a scanning probe microscopy system | Arseniy KALININ, Kevin Henri Louis MAKLES | 2025-09-30 |
| 12346036 | Alignment system and method for aligning an object having an alignment mark | Taras PISKUNOV, Erik Tabak | 2025-07-01 |
| 12169187 | Method of and system for performing subsurface imaging using vibration sensing | Daniele Piras, Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es | 2024-12-17 |
| 11977337 | Lithographic patterning method | Diederik Jan Maas, Emile van Veldhoven | 2024-05-07 |
| 11940416 | Heterodyne scanning probe microscopy method and system | Maarten Hubertus van Es, Paul Louis Maria Joseph VAN NEER, Rutger Meijer Timmerman Thijssen | 2024-03-26 |
| 11774381 | Method for measuring damage of a substrate caused by an electron beam | — | 2023-10-03 |
| 11650224 | Method of positioning a carrier on a flat surface, and assembly of a carrier and a positioning member | Jasper Winters, William Edward Crowcombe, Teunis Cornelis van den Dool, Geerten Frans Ijsbrand Kramer, Albert Dekker | 2023-05-16 |
| 11644481 | Atomic force microscopy cantilever, system and method | Maarten Hubertus van Es | 2023-05-09 |
| 11635448 | Heterodyne scanning probe microscopy method and scanning probe microscopy system | Sri Ram Shankar Rajadurai, Daniele Piras, Kodai HATAKEYAMA, Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es +1 more | 2023-04-25 |
| 11592460 | Scanning probe microscope, scan head and method | Roelof Willem Herfst | 2023-02-28 |
| 11402405 | Frequency tracking for subsurface atomic force microscopy | Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es, Rutger Meijer Timmerman Thijssen, Martinus Cornelius Johannes Maria van Riel | 2022-08-02 |
| 11327092 | Subsurface atomic force microscopy with guided ultrasound waves | Daniele Piras, Paul Louis Maria Joseph VAN NEER | 2022-05-10 |
| 11320454 | Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample | Aukje Arianne Annette Kastelijn, Peter Martijn Toet, Geerten Frans Ijsbrand Kramer, Evert Nieuwkoop, Albert Dekker +2 more | 2022-05-03 |
| 11289367 | Method, atomic force microscopy system and computer program product | Violeta Navarro Paredes, Abbas Mohtashami | 2022-03-29 |
| 11268935 | Method of and atomic force microscopy system for performing subsurface imaging | Daniele Piras, Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es | 2022-03-08 |
| 11221214 | Distance sensor, alignment system and method | — | 2022-01-11 |
| 11067597 | Method of performing atomic force microscopy with an ultrasound transducer | Martinus Cornelius Johannes Maria van Riel, Paul Louis Maria Joseph VAN NEER, Maarten Hubertus van Es | 2021-07-20 |
| 11035878 | Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system | Laurent Fillinger, Paul Louis Maria Joseph VAN NEER, Daniele Piras, Marcus Johannes VAN DER LANS, Maarten Hubertus van Es | 2021-06-15 |
| 11029329 | Method of and system for detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip | — | 2021-06-08 |
| 10976345 | Atomic force microscopy device, method and lithographic system | Abbas Mohtashami, Maarten Hubertus van Es | 2021-04-13 |
| 10948458 | Method of and system for performing detection on or characterization of a sample | Lukas Kramer, Maarten Hubertus van Es | 2021-03-16 |
| 10942200 | Heterodyne atomic force microscopy device, method and lithographic system | Abbas Mohtashami, Maarten Hubertus van Es | 2021-03-09 |
| 10935568 | Method of determining an overlay error, method for manufacturing a multilayer semiconductor device, atomic force microscopy device, lithographic system and semiconductor device | Maarten Hubertus van Es | 2021-03-02 |
| 10908179 | Device and method for measuring and/or modifying surface features on a surface of a sample | — | 2021-02-02 |
| 10859925 | Method of and system for determining an overlay or alignment error between a first and a second device layer of a multilayer semiconductor device | Violeta Navarro Paredes, Maarten Hubertus van Es | 2020-12-08 |