Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8169148 | Plasma generating apparatus | Sang Jean Jeon, Su Ho Lee, Seoung Hyun Seok, Young Min Park, Won Hyuk Jang | 2012-05-01 |
| 7804250 | Apparatus and method to generate plasma | Andrey Ushakov, Vladimir Volynets, Won Ceak Pak, Vasily Pashkovskiy, Sung-Chang Park +1 more | 2010-09-28 |
| 7740738 | Inductively coupled antenna and plasma processing apparatus using the same | Tae Wan Kim, Dong-joon Ma | 2010-06-22 |
| 7404879 | Ionized physical vapor deposition apparatus using helical self-resonant coil | Dong-joon Ma, Sergiy Yakovlevich Navala, Dae Il Kim | 2008-07-29 |
| 7381292 | Inductively coupled plasma generating apparatus incorporating serpentine coil antenna | Young Dong LEE, Seong-gu Kim, Jai-kwang Shin | 2008-06-03 |
| 7355357 | Plasma accelerator | Won-taek Park, Vasily Pashkovski | 2008-04-08 |
| 7252716 | Gas injection apparatus for semiconductor processing system | Tae Wan Kim, Dong-joon Ma, Sergiy Yakovlevich Navala | 2007-08-07 |
| 7210424 | High-density plasma processing apparatus | Sergiy Yakovlevich Navala, Dong-joon Ma, Dae Il Kim | 2007-05-01 |
| 7052583 | Magnetron cathode and magnetron sputtering apparatus comprising the same | Sergiy Yakovlevich Navala, Dong-joon Ma, Tae Wan Kim | 2006-05-30 |
| 6835919 | Inductively coupled plasma system | Dong-joon Ma, Chang-wook Moon, Hea-young Yoon | 2004-12-28 |