Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7404879 | Ionized physical vapor deposition apparatus using helical self-resonant coil | Yuri Tolmachev, Dong-joon Ma, Dae Il Kim | 2008-07-29 |
| 7252716 | Gas injection apparatus for semiconductor processing system | Tae Wan Kim, Yuri Tolmachev, Dong-joon Ma | 2007-08-07 |
| 7210424 | High-density plasma processing apparatus | Yuri Tolmachev, Dong-joon Ma, Dae Il Kim | 2007-05-01 |
| 7052583 | Magnetron cathode and magnetron sputtering apparatus comprising the same | Yuri Tolmachev, Dong-joon Ma, Tae Wan Kim | 2006-05-30 |