Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8723536 | Inspection apparatus, substrate mounting device and inspection method | Kenji Aiko, Yuichiro Iijima, Yuichiro Kato | 2014-05-13 |
| 8686383 | Object holding apparatus, and inspection apparatus | Kazuhiro Zama, Koichi Asami | 2014-04-01 |
| 8472016 | Optical defect inspection apparatus | Yuuichiro Iijima, Masayuki Hachiya, Koichi Asami, Kazuhiro Zama | 2013-06-25 |
| 8183549 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Koichi Asami | 2012-05-22 |
| 8184283 | Optical defect inspection apparatus | Yuuichiro Iijima, Masayuki Hachiya, Koichi Asami, Kazuhiro Zama | 2012-05-22 |
| 7999242 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Koichi Asami | 2011-08-16 |
| 7925390 | Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space | Takahiro Jingu, Kazuhiro Zama | 2011-04-12 |
| 7894052 | Optical defect inspection apparatus | Noriyuki Aizawa, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takahashi, Shingo Tanaka | 2011-02-22 |
| 7746461 | Optical defect inspection apparatus | Noriyuki Aizawa, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takahashi, Shingo Tanaka | 2010-06-29 |
| 7723709 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Koichi Asami | 2010-05-25 |
| 6376231 | Sample loading sheet | Tomoichi Enomoto, Hisashi Hagiwara, Kazuyoshi Kurihara, Toshio Yoshida | 2002-04-23 |
| 6284119 | DNA base sequencer | Hiroaki MACHIDA, Mitsuyoshi Koizumi | 2001-09-04 |