Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187974 | Photomask blank, photomask, and photomask manufacturing method | Yoshifumi Sakamoto, Tatsuya Nagatomo | 2021-11-30 |
| 9091931 | Photomask blank and method for manufacturing photomask | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi | 2015-07-28 |
| 8913079 | Apparatus, a method and a program thereof | — | 2014-12-16 |
| 8753786 | Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Takashi Haraguchi +1 more | 2014-06-17 |
| 8753787 | Light pattern exposure method, photomask, and photomask blank | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Takashi Haraguchi +1 more | 2014-06-17 |
| 8475978 | Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Takashi Haraguchi +1 more | 2013-07-02 |
| 8012654 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga +2 more | 2011-09-06 |
| 8003284 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga +2 more | 2011-08-23 |
| 7989124 | Photomask blank and photomask making method | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga +2 more | 2011-08-02 |
| 7767366 | Photomask blank and photomask | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga +2 more | 2010-08-03 |
| 7767367 | Photomask blank and photomask making method | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Tadashi Saga +2 more | 2010-08-03 |
| 7754397 | Phase-shift mask, manufacturing method thereof and manufacturing method of semiconductor element | Toshio Konishi, Satoru Nemoto, Jun Sasaki, Keishi Tanaka | 2010-07-13 |
| 7632613 | Levenson type phase shift mask and manufacturing method thereof | Toshio Konishi, Keishi Tanaka, Masao Otaki, Jun Sasaki | 2009-12-15 |