Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827869 | Method of micromachining a multi-part cavity | Dragan Podlesnik, Thorsten Lill, Jeff Chinn, Shaoher X. Pan, Anisul Khan +1 more | 2004-12-07 |
| 6593244 | Process for etching conductors at high etch rates | Anisul Khan, Ajay Kumar, Dragan Podlesnik, Sharma Pamarthy | 2003-07-15 |
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Wei Liu, Maocheng Li, Anisul Khan, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |
| 6127278 | Etch process for forming high aspect ratio trenched in silicon | Maocheng Li, Shaoher X. Pan | 2000-10-03 |