| 7800075 |
Multi-function module for an electron beam column |
Benyamin Buller, Juergen Frosien, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more |
2010-09-21 |
| 7514682 |
Electron anti-fogging baffle used as a detector |
Benyamin Buller, Juergen Frosien, Richard L. Lozes, Henry Pearce-Percy, Dieter Winkler |
2009-04-07 |
| 7427765 |
Electron beam column for writing shaped electron beams |
Benyamin Buller, Juergen Frosien, Xinrong Jiang, Richard L. Lozes, Henry Pearce-Percy +3 more |
2008-09-23 |
| 7372195 |
Electron beam source having an extraction electrode provided with a magnetic disk element |
Steven Thomas Coyle, Michael R. Scheinfein |
2008-05-13 |
| 7315029 |
Electrostatic deflection system with low aberrations and vertical beam incidence |
Dieter Winkler, Henry Pearce-Percy, Juergen Frosien |
2008-01-01 |
| 7227155 |
Electrostatic deflection system with impedance matching for high positioning accuracy |
Benyamin Buller, Juergen Frosien, Eugene Mirro, Henry Pearce-Percy, Dieter Winkler |
2007-06-05 |
| 6924494 |
Method of exposing a target to a charged particle beam |
Lee H. Veneklasen |
2005-08-02 |
| 6828996 |
Electron beam patterning with a heated electron source |
Glen E. Howard |
2004-12-07 |
| 6768117 |
Immersion lens with magnetic shield for charged particle beam system |
Lee H. Veneklasen |
2004-07-27 |
| 6521896 |
Blanker assembly employing dielectric material |
Michael Penberth |
2003-02-18 |
| 6392333 |
Electron gun having magnetic collimator |
Lee H. Veneklasen, Rudy F. Garcia |
2002-05-21 |
| 6274290 |
Raster scan gaussian beam writing strategy and method for pattern generation |
Lee H. Veneklasen |
2001-08-14 |
| 6002135 |
Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece |
Lee H. Veneklasen |
1999-12-14 |
| 5876902 |
Raster shaped beam writing strategy system and method for pattern generation |
Lee H. Veneklasen, R. L. Smith, Robin L. Teitzel |
1999-03-02 |
| 5729022 |
Composite concentric-gap magnetic lens and deflector with conical pole pieces |
Lee H. Veneklasen |
1998-03-17 |
| 5376505 |
Device fabrication entailing submicron imaging |
Steven Berger |
1994-12-27 |
| 4987311 |
Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine |
— |
1991-01-22 |
| 4469948 |
Composite concentric-gap magnetic lens |
Lee H. Veneklasen |
1984-09-04 |
