Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12157185 | Systems and methods for spot beam and line beam crystallization | James S. Im, Wenkai Pan, Ruobing Song, Insung Choi | 2024-12-03 |
| 8521461 | Apparatus for delivering a process gas | Iqbal Shareef, James V. Tietz, Richard J. Meinecke | 2013-08-27 |
| 8202393 | Alternate gas delivery and evacuation system for plasma processing apparatuses | Harry Wong, Christopher Charles Griffin, Mark Taskar | 2012-06-19 |
| 8150646 | Methods for delivering a process gas | Iqbal Shareef, James V. Tietz, Richard J. Meinecke | 2012-04-03 |
| 7881886 | Methods for performing transient flow prediction and verification using discharge coefficients | Iqbal Shareef, James V. Tietz, Richard J. Meinecke | 2011-02-01 |
| 7835874 | System and method for gas flow verification | Richard J. Meinecke | 2010-11-16 |
| 7822570 | Methods for performing actual flow verification | Iqbal Shareef, James V. Tietz, Richard J. Meinecke | 2010-10-26 |
| 7376520 | System and method for gas flow verification | Richard J. Meinccke | 2008-05-20 |
| 6010133 | Chamber interfacing O-rings and method for implementing same | Trace L. Boyd, Richard D. Beer, Eric A. Terbeek | 2000-01-04 |
| 5746434 | Chamber interfacing O-rings and method for implementing same | Trace L. Boyd, Richard D. Beer, Eric A. Terbeek | 1998-05-05 |
| 5262029 | Method and system for clamping semiconductor wafers | David J. Erskine, Randall S. Mundt, Dariush Rafinejad, Gerald Zhe Yao YIN | 1993-11-16 |